Film Thickness Measurement
UV-1050/1080
The UV-1050 system’s based on proprietary reflective optics
SPECIFICATIONS
| MODEL | UV-1050 / UV-1080 | |
|---|---|---|
| Maker | KLA-Tencor | |
| Wafer sizes | 100-200 mm Open Cassette | |
| Measurement system | DBS | |
| Illumination sources | Broadband Xenon Arc Lamp | |
| Objectives | Automatic, 3-position turret : 1X, 4X, 15X | |
| Beam Spot |
|
|
| Focus | Automatic focus on measurement site | |
| Computer |
Pemtium III 450MHz MMX Computer 8.0GB SCSI hard drive |
|