Film Thickness Measurement
ASET – F5x / F5
The ASET-F5x thin film measurement system combines SE technology and DBS.
The system provides sensitive, non-destructive, optical thickness.
The system provides sensitive, non-destructive, optical thickness.
SPECIFICATIONS
| MODEL | ASET F5x | ASET F5 |
|---|---|---|
| Maker | KLA-Tencor | |
| Wafer sizes |
100-200 mm Open Cassette 200-300mm Foup system |
|
| Measurement system | DBS / SE / Stress (optional) | DBS / SE |
| Illumination sources |
|
|
| Objectives | Automatic, 3-position turret : 1X, 4X, 15X | |
| Beam Spot |
|
|
| Focus | Automatic focus on measurement site | |
| Computer |
Pemtium III 450MHz MMX Computer 8.0GB SCSI hard drive |
|