Film Thickness Measurement


The UV-1250SE system is the first production tool  to use small-spot spectroscopicellipsometry in  a production fab. 

MODEL UV-1250 SE / UV-1280 SE
Maker KLA-Tencor
Wafer sizes 100-200 mm Open Cassette
Measurement system DBS / SE
Illumination sources Broadband Xenon Arc Lamp
Objectives Automatic, 3-position turret : 1X, 4X, 15X
Beam Spot
  • DBS : 40, 10, 2.7 um
  • SE : Measure within a 50 um well
Focus Automatic focus on measurement site
Computer Pemtium III 450MHz MMX
Computer 8.0GB SCSI hard drive

Company Name: SMART&S ㅣ Address: A-1705, Heungdeok IT Valley, 13, Heungdeok 1-ro, Giheung-gu, Yongin-si, Gyeonggi-do, 16954, Korea ㅣ President: Richard Lim | TEL: 82-31-8065-5959 ㅣ FAX: 82-31-8065-5989

© Copyright 2018. SMART&S All Rights Reserved.