Film Thickness Measurement
UV-1250/1280
The UV-1250SE system is the first production tool
to use small-spot spectroscopicellipsometry in
a production fab.
SPECIFICATIONS
| MODEL | UV-1250 SE / UV-1280 SE | |
|---|---|---|
| Maker | KLA-Tencor | |
| Wafer sizes | 100-200 mm Open Cassette | |
| Measurement system | DBS / SE | |
| Illumination sources | Broadband Xenon Arc Lamp | |
| Objectives | Automatic, 3-position turret : 1X, 4X, 15X | |
| Beam Spot |
|
|
| Focus | Automatic focus on measurement site | |
| Computer |
Pemtium III 450MHz MMX Computer 8.0GB SCSI hard drive |
|